International SubFAB Research Labs (ISRL USA) and AI Infrastructure Partners (AIIP) announced a memorandum of understanding (MOU) to design, build and operate a purpose-built research and development facility dedicated to semiconductor subfab infrastructure. The platform will support a broad ecosystem, including independent device manufacturers (IDMs), foundries, OEMs, subfab suppliers, materials companies and research institutions.
Under the MOU, AIIP will design, build and own the facility and infrastructure. ISRL USA will lead technical operations, research programs and the industry-neutral, multi-member platform. The facility will replicate high-volume manufacturing conditions using legacy and modern process tools, providing members with a fully instrumented research environment for intellectual property-protected programs covering materials reclaim, next-generation abatement, equipment validation and workforce development.
“This MOU is a defining moment for ISRL USA and the semiconductor industry. For the first time, we have a credible path to the subfab R&D infrastructure chipmakers urgently need,” ISRL USA CEO Scott Balaguer said. “Together, we are building a platform where manufacturers, OEMs and innovators can collaborate on sustainability challenges that no single company can tackle alone.”
The subfab is the infrastructure layer beneath the cleanroom responsible for vacuum pumping, gas abatement and chemical waste management. It accounts for the semiconductor industry’s largest environmental footprint but has no dedicated R&D infrastructure.
The advanced subfab R&D facility will reportedly provide a shared Infrastructure-as-a-Service (IaaS) environment, allowing semiconductor companies to conduct pre-competitive research, validate technologies and generate compliance-ready data at a lower cost and risk than standalone pilot lines.
The MOU establishes the framework for definitive agreements, with site selection currently underway. The facility is structured to qualify for CHIPS Act incentives, Horizon EU programs and regional economic development funding, with operational readiness targeted within 12 months of full funding. The industry-neutral, multi-member IaaS model provides each participant IP-protected program access without the capital burden of a proprietary facility.
ISRL USA invited industry stakeholders to contact the company regarding membership and program participation in the facility.
