PTI Mass Flow Controller
Brooks Instrument (Hatfield, PA) has launched the GF135, a revolutionary pressure transient insensitive (PTI) mass flow controller for semiconductor manufacturing, says the company. The GF135 can improve yield and uptime with real-time integral rate-of-decay flow measurement and advanced diagnostic capabilities to verify accuracy, check valve leak-by, and monitor sensor drift without stopping production of wafers. The GF135 provides market-leading process gas accuracy and ultra-fast flow settling time for reduced process cycle times. The device uses Brooks’ patent-pending real-time rate-of-decay flow error detection technology to continually test for changes in the device’s performance.
See more at www.brooksinstrument.com.